How Mounting Pressure Can Affect Wafer Heater Heat Transfer

https://industrial-heater-world.overblog.fr/2026/09/ito-glass-heater-technology-explained-for-engineers-and-designers.html

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result