In MEMS, stiction between matter surfaces can immobilize moving parts, alleviated by hydrophobic coatings, dimples

https://easypdfshare.com/s/4-TlO9Ozv25w9UHdg_enP

In MEMS, stiction between matter surfaces can immobilize moving parts, alleviated by hydrophobic coatings, dimples, and controlled drying protocols.